采用三种商业3D打印机尝试加工了金属材质和树脂材质的微型靶零件。通过EOSINT M290 3D打印机以激光烧结的方式加工了钛金属靶架；通过Object 30 Pro 3D打印机以聚丙烯树脂为材料,通过喷射打印的方式加工了构型复杂的树脂靶架；通过Freeform Pico 3D打印机以蜡质树脂为材料,通过光固化成型的加工方式,获得了微腔、圆柱和平面元件,并在其表面设计了周期性图形结构。采用光学工具显微镜和共聚焦显微镜对样品的尺寸和表面形貌进行了表征。结果表明：金属靶架的线粗糙度为7.3~17.79 μm,抛光之后降低为0.87~1.66 μm；树脂靶架的面均方根粗糙度为2.88 μm；微腔和圆柱元件端面的面均方根粗糙度为2.03 μm,表面的条纹周期与设计值偏差为1.40%,平均振幅值偏差为55.50%；平面元件的面均方根粗糙度为4.87 μm,表面调制图形的周期与设计值偏差为0.80%,平均振幅偏差为3.60%。通过商业3D打印机加工靶零件,为惯性约束聚变实验中微靶零件的加工提供了新思路。

A polystyrene (CH)/resorcinol formaldehyde (RF)/CH tri-layer perturbation target for hydrodynamic instability experiments in inertial confinement fusion (ICF) was designed and fabricated and its features were discussed. The target was composed of a perturbed CH layer, a RF aerogel sheet and an unperturbed CH layer. The detailed fabrication method consisted of four steps. An aluminum alloy template with sinusoidal perturbation patterns was prepared by the single-point diamond turning technology; the CH layer was prepared via a simple method which called dip-coating method; the RF aerogel sheet was prepared by sol–gel and supercritical drying process; finally, a CH layer, the RF aerogel sheet and another CH layer were put on the perturbed aluminum alloy template and hot-pressed at 150 ℃ for 2 h to make these three layers adhered together without the use of adhesive and to transfer the perturbation patterns from the template to the CH layer. A scanning electron microscope (SEM) was used to investigate the microstructure of the RF aerogel sheet. Parameters of the target, such as perturbation wavelength (T) and perturbation amplitude (A), were characterized by QC-5000 tool microscope and alpha-step 500 surface profiler. The results showed that T and A of the target were about 55 and 3.88 lm respectively, the perturbation patterns transferred from the alloy template to the CH layer precisely. Thickness of the perturbed CH layer (H1), RF aerogel sheet (H2) and unperturbed CH layer (H3) and cross-section of the tri-layer target were characterized by QC-5000 tool microscope and SEM. H1, H2 and H3 were about 50, 300 and 20 lm respectively, the cross-sectional photographs of the target showed that the CH layer and the RF aerogel sheet adhered perfectly with each other. As this CH/RF/CH tri-layer target use the RF aerogel to simulate the DT ice of the ignition target capsule, the whole target very close to the actual ignition target capsule.

采用溶胶-凝胶工艺，以氯化镧（LaCl_{3·7H2O）为前驱体，以甲醇和乙醇为溶剂，聚丙烯酸为分散剂，环氧丙烷为凝胶促进剂，分别合成两种性能不同的稀土La基气凝胶。采用扫描电子显微镜、傅里叶红外光谱仪、比表面积与孔径分析仪、力学性能测试仪对不同溶剂制备的两种稀土La基气凝胶的微观结构、成分、比表面积、孔径分布和力学性能进行了研究表征。结果表明，以甲醇和乙醇为溶剂制备的稀土La基气凝胶都具有纳米多孔材料的典型特征，由大量nm量级的球形和长条形颗粒胶连而成，孔洞结构丰富。以乙醇为溶剂制备的稀土La基气凝胶的网络骨架更纤细，孔洞更大，比表面积达到220 m^{2·g-1，密度约为160 mg·cm-3，但力学性能较差。而以甲醇为溶剂制备的稀土La基气凝胶的网络骨架更强壮，孔洞更小，比表面积达到95 m2·g-1，密度约为350 mg·cm-3，力学性能较好。样品性能上的差异可能是由甲醇的极性比乙醇的极性强引起的。}}

低密度的高原子序数元素氧化物气凝胶由于前驱体形成端基双键而易于收缩和开裂。通过调控配位环境结合无机分散溶胶凝胶法, 制备了稀土氧化物气凝胶。氧化镧基气凝胶和氧化钇基气凝胶块体的成型性好, 最低密度分别为0.05 g·cm-3和0.06 g·cm-3。其成分分别为六方相的La(OH)3和六方相的Y(OH)3, 而聚丙烯酸中的羧基与稀土离子之间以桥接的方式进行配位。两种气凝胶均存在明显的多级结构, 氧化镧基和氧化钇基气凝胶的初级粒子分别为纤维状和片/球混合形貌, 而其二级粒子均为球形。两种气凝胶的比表面积分别为229.1 m2·g-1和229.6 m2·g-1。该方法制备的稀土氧化物气凝胶具有低的密度和纳米尺度的均匀性, 在背光源中有潜在的应用。

A polystyrene (CH)/aluminum (Al) dual-layer perturbation target for hydrodynamic instability experi-ments in inertial confinement fusion (ICF) was designed and fabricated. The target was composed of aperturbed 40 m Al foil and a CH layer. The detailed fabrication method consisted of four steps. The 40 mAl foil was first prepared by roll and polish process; the perturbation patterns were then introduced onthe surface of the Al foil by the single-point diamond turning (SPDT) technology; the CH layer was pre-pared via a simple method which called spin-coating process; finally, the CH layer was directly coatedon the perturbation surface of Al foil by a hot-press process to avoid the use of a sticker and to eliminatethe gaps between the CH layer and the Al foil. The parameters of the target, such as the perturbationwavelength (T) and perturbation amplitude (A), were characterized by a QC-5000 tool microscope, analpha-step 500 surface profiler and a NT1100 white light interferometer. The results showed that T and Aof the target were about 52 μm and 7.34 μm, respectively. Thickness of the Al foil (H1), thickness of theCH layer (H2), and cross-section of the dual-layer target were characterized by a QC-5000 tool micro-scope and a scanning electron microscope (SEM). H1 and H2 were about 40 μm and 15 μm, respectively,the cross-sectional photographs of the target showed that the CH layer and the Al foil adhered perfectlywith each other.

在惯性约束聚变(ICF)实验中, 点火靶丸表面(界面)的粗糙度和缺陷所产生的流体力学不稳定性是决定点火成功与否的关键因素之一, 设计和研制流体力学不稳定性分解实验用靶是解决该问题的主要技术手段。结合国内外的研究现状和神光-Ⅱ激光装置的特点, 设计并研制了一种新型柱状激波管。该靶型由三种介质组成, 分别为调制聚苯乙烯(CH)圆片、柱状碳气凝胶(CRF)和CH微套管。调制CH圆片和柱状CRF通过微加工技术装配到CH微套管内, 封装后形成柱状激波管。介绍了该靶型的设计原理和详细的制备工艺, 并对相应的靶参数进行了测量。结果表明: 柱状CRF气凝胶具有较好的成型性, 长度、直径和密度分别为1000 μm、730 μm和250 mg·cm-3; CH圆片的厚度和直径分别为15 μm和730 μm, 表面调制图形的周期和峰谷差分别为100 μm和4.3 μm; 实验得到的柱状激波管的轴向和径向最大装配误差分别为2 μm和3 μm。

为了研究惯性约束聚变(ICF)实验用靶丸不同密度界面的流体力学不稳定性增长，设计并制备了聚苯乙烯(CH)/碳气凝胶(CRF),CRF /硅气凝胶(SiO2)和CH/Al三种双介质调制靶。采用溶胶-凝胶工艺制备了密度分别为250和800 mg/cm3的CRF气凝胶薄片；采用激光微加工工艺分别在两种不同密度的CRF薄片和工业用纯Al箔上引入调制图形；采用旋涂工艺在Al箔和CRF薄片(250 mg/cm3)的调制表面制备一层CH薄膜，得到CH/Al和CH/CRF双介质调制靶，采用溶胶-凝胶工艺在CRF薄片(800 mg/cm3)表面制备一层低密度SiO2气凝胶，得到CRF/SiO2双介质调制靶。采用电子天平、扫描电子显微镜、工具显微镜和台阶仪对所制备的CH/CRF,CRF/SiO2和CH/Al三种双介质调制靶进行靶参数测量。结果表明: 三种双介质调制靶层与层之间结合紧密，界面清晰，调制图形为正弦，靶参数测量准确。

介绍了碳气凝胶/聚苯乙烯（CRF/CH）双介质柱状靶的制备方法。使用溶胶-凝胶法和微模具原位成型法制备了直径为820 μm的间苯二酚-甲醛（RF）气凝胶微柱，在氮气保护下进行高温碳化后得到直径为730 μm、密度为250 mg·cm-3的CRF微柱；采用浸渍提拉法在CRF微柱柱面镀制一层厚度为26 μm 的CH薄膜， 形成CRF/CH双介质结构；采用机械微切割技术制备了长度为1 mm， 内径为730 μm，壁厚为26 μm的CRF/CH双介质柱状靶。实验研究了RF,CRF气凝胶微柱的制备工艺、微观形貌及CRF微柱轴向和径向的密度均匀性，探讨了影响CH薄膜厚度的主要因素，并对CH薄膜的表面形貌和两种材料之间的界面进行了表征。

以间苯二酚-甲醛为原料，结合自制活动式微模具成型工艺制备不同厚度和密度的碳气凝胶薄片，采用密度为10 mg·cm-3的SiO2溶胶为“粘合剂”，获得单元薄片厚度在100～580 μm，密度在50～400 mg·cm-3范围内变化的5层密度渐变碳气凝胶靶型。重点研究了该特殊靶型内部C/SiO2气凝胶层间界面情况。采用场发射扫描电镜(FESEM),X射线相衬成像仪等对靶型整体结构及碳气凝胶单元薄片表面和内部微观结构进行了表征。结果表明：胶粘层SiO2气凝胶厚度约为15 μm，厚度一致，远小于碳气凝胶层厚度且与碳气凝胶薄片的胶粘程度较好，界面平整，靶结构均匀。(Shanghai Key Laboratory of Special Microstructure Materials and Technology， Tongji University， Shanghai 200092， China)Abstract：Key words: